FIELD: physics.
SUBSTANCE: multifunctional scanning probe microscope comprises: a base (1); an approach unit (3) movably mounted on the base (1); a piezoscanner (4) situated on the preliminary approach unit (3); an object holder (5) situated on the piezoscanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezoscanner (4) by the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); and an analyser mounted on the platform (9) and comprising a first measuring head (13) facing the sample (6) and adapted for probing the measuring area (M) of the sample (6). The microscope also has first and second guides (10, 11) fastened to the platform (9). The analyser has a second measuring head (16) facing the sample (6) and adapted for probing the measuring area (M) of the sample (6). The first and second measuring heads (13, 16) are movably mounted on the first and second guides (10, 11) respectively.
EFFECT: enabling fast change of measurement modes.
15 cl, 14 dwg
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