FIELD: physics.
SUBSTANCE: scanning probe microscope with a nanotome has a basic element on which there is a die holder with a holder interfaced with a first drive, a sample holder with a sample interfaced with a second drive and a scanning unit which can be interfaced with the sample. The first drive has a single-coordinate (coordinate Y) which moves die towards the sample. The second drive has one coordinate (coordinate X) which moves the sample holder with the sample perpendicular to coordinate Y.
EFFECT: high measurement accuracy and broader functional capabilities of the device.
21 cl, 18 dwg
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