FIELD: physics.
SUBSTANCE: in the advancement device, the carriage 10 is elastically coupled to the transition element 9 along the coordinate Z perpendicular to the X, Y coordinate plane.
EFFECT: increasing the accuracy of the device and expanding its functionality.
10 cl, 9 dwg
Title | Year | Author | Number |
---|---|---|---|
ANGLE SCANNING DEVICE | 2015 |
|
RU2628673C2 |
DEVICE FOR SAMPLE SHIFT | 2005 |
|
RU2377620C2 |
SCANNING PROBE MICROSCOPE FOR INVESTIGATION OF BULK OBJECTS | 2010 |
|
RU2515731C2 |
INERTIAL STEP MOTOR | 2008 |
|
RU2465712C2 |
SCANNING PROBING MICROSCOPE, COMBINED WITH DEVICE FOR MODIFYING SURFACE OF OBJECT | 2005 |
|
RU2282257C1 |
SCANNING SOUNDING MICROSCOPE | 1999 |
|
RU2159454C1 |
SCANNING PROBE MICROSCOPE COMBINED WITH SAMPLE SURFACE MODIFICATION DEVICE | 2017 |
|
RU2653190C1 |
SCANNING PROBE MICROSCOPE WITH MULTIPLE-PROBE SENSOR OPERATING DEVICE | 2013 |
|
RU2538412C1 |
HANDLING DEVICE | 2014 |
|
RU2591871C2 |
COORDINATE TABLE | 2015 |
|
RU2618073C1 |
Authors
Dates
2018-08-22—Published
2016-11-24—Filed