SCANNING PROBE MICROSCOPE FOR INVESTIGATION OF BULK OBJECTS Russian patent published in 2014 - IPC G01Q10/00 B82Y35/00 

FIELD: measurement equipment.

SUBSTANCE: device is designed for performance of probing measurements on objects of complex shape, for instance, on pipes in oil and nuclear power industries. The substance of the invention consists in the fact that into a scanning probe microscope for investigation of bulk objects, comprising a measurement head with a piezoscanner and a probe, coupled with a unit of analysis and control, an approach module, three support stands installed on the measurement head, and a drive of the measurement head, included into the approach module, additionally a platform is added, on which there is a double-coordinate table installed, being coupled with the body installed on it as capable of rotation, on which there is the approach module, in which the measurement head is fixed with the piezoscanner and the probe. The measurement head comprises two spring supports, and the platform - modules of fixation to the object.

EFFECT: expansion of functional capabilities of a device.

7 cl, 2 dwg