INERTIAL STEP MOTOR Russian patent published in 2012 - IPC H02N2/02 H01L41/04 H01L41/09 

FIELD: electricity.

SUBSTANCE: invention may be used, for instance, in a scanning probe microscope (SPM) for approach of a probe and a specimen, or for movement of samples in plants of electron, ion, probe or other effect. The inertial step motor comprises a base with the first piezomodule, connected with the piezomodule holder, a pusher, a guide, a movable carriage and a control unit. A clamp is mounted on a base. The piezomodule holder is "П"-shaped and is fixed on the clamp. The movable carriage is installed on guides on the base. The pusher is coupled with the movable carriage, fixed on the piezomodule holder and may be made either from a solid alloy, have a plate shape or as a cylinder or a ball. The piezomodule holder may be fixed on the clamp as capable of rotation around it. The clamp may contain a flat spring and be coupled with a controlled stop. The first piezomodule may have the first pad coupled with the first arm of the "П"-shaped holder, or the second pad, coupled with the second arm of the "П"-shaped holder. The movable carriage may be equipped with a polycor or a ceramic plate coupled with the pusher. The second piezomodule may be introduced between the first piezomodule and the piezomodule holder.

EFFECT: improving device operation stability and reliability.

11 cl, 3 dwg