FIELD: engines and pumps.
SUBSTANCE: invention may be used in, for example, scanning probe microscope for bringing probe and specimen together. Proposed invention consists in that motor including bed whereat first piezo module first end is secured. Said first piezo module second end is connected with second end of the guide coupled with moving carriage. Additionally, support is used secured on said bed and coupled with guide second end.
EFFECT: higher stability and reliability, longer life and better maintainability.
10 cl, 2 dwg
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