METHOD OF EXAMINING SOLID BODY SURFACE WITH TUNNEL MICROSCOPE Russian patent published in 2009 - IPC H01J37/285 

FIELD: physics; measurement.

SUBSTANCE: present invention pertains to examination of microrelief of conducting and non-conducting surfaces of samples of solid bodies. The method of examining the surface of a solid body using a scanning tunnel microscope involves creating a conducting replica of the test surface, scanning this replica with a tunnel microscope on one side and then on the other side using the same needle, but mirror inverted in the scanning plane, superposition of direct and inverted reverse scanning tunnel microscope images, reconstruction of the real surface through comparison of angles of inclination of tangents in corresponding points of both scanning tunnel microscope profilograms.

EFFECT: simplification of the process of reconstructing the real surface of the test sample from scanning tunnel microscope profilograms, increased accuracy, as well as possibility of using a scanning tunnel microscope for examining conducting and non-conducting surfaces.

3 dwg