SCANNING TUNNEL MICROSCOPE Russian patent published in 2003 - IPC

FIELD: scientific instrumentation, winning of topography of conducting surfaces, study of physical and chemical properties of solids. SUBSTANCE: scanning tunnel microscope includes precise piezodrive for movement of measurement point along axes X, Y, Z, holder of specimen with stepping piezodrive of its approach to point, unit measuring tunnel current and unit controlling tunnel interval connected in series, unit recording topography of examined surface with controlling computer, compensation unit, commutator, axis Z high-voltage voltage amplifier. Microscope is supplemented with unit measuring error of prediction of relief height incorporating analog-to-digital converter, differential amplifier, digital- to-analog converter and unit of adaptive control over piezodrives comprising commutator, digital-to-analog-converter, unit of adaptive approach of specimen to point and signal processor. EFFECT: raised productivity and reliability of measurements with increase of precision and speed. 2 dwg