SOLID-STATE GAS SENSOR (VERSIONS) Russian patent published in 2009 - IPC G01N27/12 

FIELD: physics.

SUBSTANCE: proposed gas sensor, according to the first version, contains a substrate made from valve metals, in form of a thin wire serving as a reference electrode. The substrate is covered with a metal-oxide gas-sensitive layer with deposition of an electroconductive gas-premeable contact as the measuring electrode and serving as a microheater at the same time, the power leads of which are attached to the opposite butt ends of the thin wire. Leads from the measuring electrode and substrate - thin wire are connected to a recording device. In the second version of the sensor the substrate is a metal strip deposited on an insulator. Metal-oxide gas-sensitive layers on the substrate are made using anodic oxidation method. The substrate-microheater in both versions of the solid-state gas sensor is an electrical resistance stabilising thermometre, connected to an external power supply.

EFFECT: increased reliability and stability of parametres, and simple design and technology.

6 cl, 2 dwg