FIELD: gas industry.
SUBSTANCE: invention can be used for creation of sensor of atmosphere composition change in enclosed volumes. Summary of invention consists in fact, that gas sensor contains temperature conductive substrate from crystalline material with plane-parallel surfaces, on working surface of which film heater from electrically conducting material is arranged, and on nonworking surface is temperature measuring device based on acoustic delay line, interdigital type electromechanical piezoelectric transducers of which are connected to generator and output signal recorder, heater control unit, film heater is made in form of set of individual elongated elements from gas-sensitive materials, selected under condition of their electrical resistance changing with adsorption of different by composition gases, elements are connected to individual heaters control unit outputs, wherein each said element is restricted at long sides by grooves, filled with heat- and noise-insulating material, temperature measuring device based on acoustic delay line is made multi-channel by number of elongated elements, each channel is placed in direction of surface acoustic waves energy flows propagation and/or plate resilient modes of different orders n in substrate, wherein emission and reception of said waves and/or modes is carried out by individual generation and reception systems at frequencies fn, determined by expression fn=Vn/λ, where Vn is speed of surface acoustic waves or plate resilient modes, λ is period of interdigital transducers, and elongated elements are arranged along projections of said power flows propagation directions onto substrate working surface.
EFFECT: technical result is enabling possibility of increasing total number of gases at increased measurement accuracy and reduced threshold of actuation.
10 cl, 8 dwg, 1 tbl
Title | Year | Author | Number |
---|---|---|---|
MULTIPLEXER ACOUSTIC ARRAY FOR "ELECTRONIC NOSE" AND "ELECTRONIC TONGUE" ANALYTICAL INSTRUMENTS | 2013 |
|
RU2533692C1 |
HYBRID ACOUSTIC SENSOR OF THE ELECTRONIC NOSE AND ELECTRONIC TONGUE SYSTEM | 2017 |
|
RU2649217C1 |
METHOD OF DETERMINING PLASMA ETCHING PARAMETERS | 2018 |
|
RU2686579C1 |
SENSITIVE ELEMENT FOR ACOUSTIC LIQUID SENSOR | 2016 |
|
RU2632575C1 |
PASSIVE WIRELESS SURFACE ACOUSTIC WAVE SENSOR FOR MEASURING CONCENTRATION OF CARBON MONOXIDE | 2015 |
|
RU2581570C1 |
RESONATOR ON SURFACE ACOUSTIC WAVES | 2017 |
|
RU2643501C1 |
ACOUSTIC MULTICHANNEL ANALYZER OF MICRO SAMPLES OF LIQUID MEDIA | 2019 |
|
RU2712723C1 |
METHOD AND DEVICE TO MEASURE ANGULAR SPEED | 2010 |
|
RU2426132C1 |
METHOD AND DEVICE TO MEASURE ANGULAR SPEED | 2010 |
|
RU2426131C1 |
METHOD OF DETERMINING LIQUID CHARACTERISTICS AND DEVICE FOR REALISING SAID METHOD | 2009 |
|
RU2408881C1 |
Authors
Dates
2017-01-10—Published
2015-11-20—Filed