FIELD: various technological processes.
SUBSTANCE: invention relates to the field of formation of gas-sensitive coatings on the surface of sensors of chemoresistive type used for detection of analyte gases, in particular, nitrogen oxides. According to the invention, the method of producing a vanadium oxide gas-sensitive coating on the surface of the working element of the sensor for detecting NO2 involves treating the ceramic surface of the working element of the sensor successively repeatedly and alternately with VOCl3 and distilled water vapours in a stream of dried carrier gas, wherein the surface of the working element of the sensor is processed in a flow-vacuum type reactor in a stream of dried nitrogen with a dew point of -65 °C.
EFFECT: formation of a vanadium oxide gas-sensitive coating on the surface of the working element of the sensor according to the technology of molecular layering for detecting nitrogen dioxide.
3 cl, 2 dwg
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