HIGH-BRIGHTNESS SOURCE OF SHORT-WAVE RADIATION (OPTIONS) Russian patent published in 2021 - IPC G21K3/00 H05G2/00 H01J35/02 

FIELD: physics.

SUBSTANCE: invention relates to impulse high-brightness radiation sources in the wavelength range of 0.4-120 nm. Radiation source contains a vacuum chamber (1) with an impulse radiating plasma area and contamination counter-measures devices (5), including two or more housings (6) intended for the formation of contamination-free homocentric beams (7) of the short-wave radiation directed from the impulse radiating plasma area (2) to the optical collector (3). The surface of each casing (6) contains two first faces (8), oriented in radial directions to the impulse radiating plasma area and parallel to the selected direction, for example, a vertical. Permanent magnets (9) are placed outside each casing (6), creating magnetic field inside the casings (6). The optical collector (3) preferably consists of several mirrors (4) installed in the route of each of the short-wavelength radiation beams. In this option of the invention, the plasma represents laser plasma of the liquid metal target material (16) supplied to the focusing area of the laser beam using a rotating target assembly (19).

EFFECT: creation of powerful high-brightness sources of short-wave radiation with highly effective contamination countermeasures in a beam of short-wave radiation, propagating in a large, preferably more than 0.25 sr (steradian), solid angle.

17 cl, 3 dwg