HUMIDITY SENSOR AND WAY OF ITS MANUFACTURING Russian patent published in 2009 - IPC G01N27/12 

FIELD: physics.

SUBSTANCE: invention can be used for determination of air humidity. The sensor, according to the invention, is made by etching of borate-bismuth glass of the following composition: bismuth oxide (III) - 70%, molybdenum oxide (VI) - X%, boric oxide (III) - (30-X)% where X=0.5-7, with the electric contacts fixed on its surface in concentrated orthophosphoric acid with the subsequent one-phasic machining of the formed layer of insolublis phosphate of bismuth by an ammonium paramolybdate solution and hydrogen superoxide. The deposit formed thus in regular intervals is distributed on a surface of a gas-trapping sensor element. The obtained sensor is characterised by dependence of conductance on the maintenance of steams of water in air in the interval maintenances from 0.008 to 30 mg/m³, the relative measuring accuracy makes 0.03-0.07.

EFFECT: high sensitivity of the sensor according to the invention.

2 cl, 5 ex, 1 dwg