FIELD: process engineering.
SUBSTANCE: invention relates to positioning devices. Proposed device comprises guide supporting first element with its linear drive, second element arranged on second guide perpendicular to the first one. Said elements can mutually travel along the axis located at acute angle to axis of one of the guides and lying in plane perpendicular to the axis of second guide. Both guides are aerostatic ones, while first and second elements are mounted on carriages moving in appropriate guides. Elements fitted in their appropriate carriages can turn about carriage axis though one and the same angle. Said elements are separated by gaps with their section perpendicular to motion axis being invariable. Elements are furnished with throttles. Device incorporates outer source of compressed fluid medium that communicates with elements throttles.
EFFECT: higher accuracy of positioning in nanometer-range.
2 cl, 1 dwg
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