BUILT-IN CIRCULAR DEVICE FOR MEASURING PRESSURE Russian patent published in 2009 - IPC G01L9/12 G01L13/02 G01F1/38 

FIELD: physics.

SUBSTANCE: invention is meant for use in fields requiring ultrapure technology. A capacitance pressure sensor (28) of process fluid, made in form of a ring which is placed in the stream of the fluid, has a flexible diaphragm (48) and an electrode (50), integrated with an electric insulator (54). The diaphragm, insulator and electrode are placed on the entire inner surface of the sensor, placed downstream the process fluid in a reservoir, with possibility of moving the diaphragm about the electrode under the effect of the fluid such that, the capacitance between the electrode and diaphragm, which form an annular capacitor, depends on the pressure of the fluid. Two pressure sensors (28) in form of annular capacitors, divided by a flow-restricting element (21), meant for creating pressure difference when placed in the stream of the fluid, form a flow sensor (10).

EFFECT: invention increases accuracy of measuring pressure.

19 cl, 11 dwg