FIELD: physics; optics.
SUBSTANCE: device has optically connected and series-arranged source of coherent optical radiation, optical system, beam splitter, reflector, fixed to the surface of the object under test and placed at an angle to the beam splitter, a screen fitted with a photodetector device. The photodetector device, which is made in form a rectangular matrix of photodetectors, is fitted in the plane of the screen, radial to rings of the interference pattern in the horizontal section in the interval from the edge of the interference pattern, opposite vertex of the angle between the beam splitter and the reflector, to the centre of the interference pattern.
EFFECT: improved quality of measuring small displacements of surfaces of objects.
1 dwg
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