METHOD OF MEASURING LINEAR AND ANGULAR DISPLACEMENTS Russian patent published in 2010 - IPC G01B11/00 G01B9/02 

FIELD: physics.

SUBSTANCE: maxima of +1 and -1 of orders of an interference pattern in form of set of rings of different intensity, obtained from superposition in a laser interferometre of beams reflected from a beam splitter in form of a sinusoidal grating and the surface of a control object respectively, are projected onto a screen. Two groups of photodectors are placed in regions of maxima +1 and -1 of orders of the interference pattern. Intensity of the optical field of each group of photodetectors is measured, from which values of linear and angular components of the small displacement of the surface of the control object are measured. The measurement value taken is that value of linear and angular components of displacement which simultaneously satisfy values of the measured intensity in corresponding maxima +1 and -1 of orders of the interference pattern.

EFFECT: wider functional capabilities due to simultaneous measurement of linear and angular components of small displacement.

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