INTERFERENTIAL METRE OF FINE MOVEMENTS Russian patent published in 2011 - IPC G01B11/00 G01B9/02 

FIELD: measurement equipment.

SUBSTANCE: invention is intended to measure fine movements of controlled object surfaces and is based on application of optical interferential methods. Device comprises optically joined and serially arranged source of coherent optical radiation, optical system, light divider, reflector, screen and photodetector. Reflector is fixed on surface of controlled object rigidly joined to support base, and is arranged at the angle to light divider. Besides, imitator of controlled object is rigidly fixed on support base. Additional reflector is installed on surface of imitator and in the same plane with reflector on surface of controlled object. Imitator is arranged with the possibility to adjust position of additional reflector. Photodetector and additional photodetector are installed in plane of screen in area of interferential pattern. Interferential pattern is additionally projected from additional reflector to screen. Outlets of photodetectors are electrically connected to inlets of differential amplifier, outlet of which is joined to device of registration, processing and display of measurement results.

EFFECT: increased accuracy of results of measurements of fine movements of surface of controlled objects.

4 dwg