METHOD OF MEASURING LINEAR AND ANGULAR COMPONENTS OF SMALL MOVEMENTS OF SURFACES OF CONTROLLED OBJECTS Russian patent published in 2017 - IPC G01B11/24 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment, specifically to methods of measuring small displacements of surfaces of monitoring objects using optical laser sensors, based on use of interference methods. Method consists in that, maxima of interference pattern in form of a set of rings of various intensity, obtained during superposition in laser interferometer of coherent beams reflected from beam splitter and surface of controlled object, respectively, are projected onto a screen. In plane of screen in given areas of interference pattern, photodetectors are arranged, by means of which optical field intensity is measured at place of their installation with change of position of surface of controlled object, and marked movement of surface of controlled object is determined based on change in uniquely related optical field intensity in interference pattern, measured by photodetectors. Furthermore, beam splitter used in laser interferometer is a phase grating, on screen are projected maxima of +1, 0 and -1 orders of interference pattern, photodetectors are divided into three groups. Each group is placed in corresponding maxima of +1, 0 and -1 orders of interference pattern, further, method includes simultaneously measuring optical field intensity of each of groups of photodetectors, and values of linear and angular components of small displacement surface of controlled object is determined based on three intensity values, measured by said groups of photodetectors in corresponding areas of maxima of +1, 0 and -1 orders using known for each of the maximum relationships, associating intensity with linear and angular components of small displacement surface of controlled object.

EFFECT: broader functional capabilities of methods of measuring small displacements surfaces of a controlled object using optical laser interferometers due to simultaneous measurement of linear and angular components of small displacement.

1 cl, 2 dwg