FIELD: instrumentation.
SUBSTANCE: invention refers to the field of instrumentation and can be used for pressure measuring in conditions of measured medium non-steady temperatures (thermal shock) action. Heat-resistant thin-film strain pressure sensor contains diaphragm where resistance strain gages are installed along circular arc and in radial direction. These strain gages are included into metering bridge. Strain gages installed in circumferential direction are made consisting of several parts in the form of circular arcs of equal lengths. Each of the arcs is located along circumference with radius equal to Inner radii of subsequent from the diaphragm centre parts of circumferential strain gages coincide with outer radii of previous circumferential strain gages. In this structure components of circumferential strain gages by their inner radius are located along circumference with radius of by their outer radius - along circumference with radius of Outer radius of the last part of circumferential strain gage coincides with radius r2 of the circumference along which the end of each component of radial strain gage is located.
EFFECT: increase in accuracy of pressure measuring in conditions of thermal shock action while keeping sensitivity.
9 dwg
Title | Year | Author | Number |
---|---|---|---|
PRESSURE SENSOR BASED ON TENSORESISTOR THIN-FILM NANO- AND MICRO-ELECTROMECHANICAL SYSTEM | 2009 |
|
RU2397460C1 |
STRAIN GAUGE PRESSURE SENSOR ON BASIS OF THIN-FILM NANO- AND MICROELECTROMECHANICAL SYSTEM | 2009 |
|
RU2391640C1 |
METHOD OF MAKING NANO- AND MICRO-ELECTROMECHANICAL PRESSURE SENSOR SYSTEM AND PRESSURE SENSOR BASED ON SAID SYSTEM | 2009 |
|
RU2398195C1 |
THERMALLY STABLE PRESSURE SENSOR BASED ON NANO-AND MICRO-ELECTROMECHANICAL SYSTEM WITH MEMBRANE HAVING RIGID CENTRE | 2015 |
|
RU2601613C1 |
PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM OF INCREASED ACCURACY AND RELIABILITY | 2012 |
|
RU2480723C1 |
HIGH PRECISION PRESSURE SENSOR BASED ON NANO- AND MICRO-ELECTROMECHANICAL SYSTEM WITH THIN-FILM TENSORESISTORS | 2010 |
|
RU2411474C1 |
SENSOR FOR METAL FILM STRAIN PRESSURE GAUGE | 2003 |
|
RU2240520C1 |
PRESSURE SENSOR WITH THIN-FILM TENSORESISTOR NANO- AND MICRO-ELECTROMECHANICAL SYSTEM | 2009 |
|
RU2399031C1 |
THIN-FILMED PRESSURE TRANSDUCER | 2004 |
|
RU2261420C1 |
THIN-FILM PRESSURE TRANSDUCER | 1987 |
|
RU2041452C1 |
Authors
Dates
2009-12-10—Published
2008-07-14—Filed