FIELD: process engineering.
SUBSTANCE: proposed method comprises first stage of applying plastically deformable layer on substrate. Note here that said substrate features multiple mutually isolated recesses on its upper surfaces. This method comprises also second stage of extending area in every of said recesses to produce multiple columnar cells mating aforesaid multiple recesses.
EFFECT: miniature matrix structure of cells for use in optical scanning systems.
20 cl, 51 dwg
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