SUPERHIGH VACUUM SCANNING SOUNDING MICROSCOPE Russian patent published in 2000 - IPC

FIELD: nanotechnological equipment, devices ensuring observation, measurement and modification of surfaces of objects under tunnel and atomic power modes under conditions of superhigh vacuum and in wide temperature range. SUBSTANCE: proposed superhigh vacuum scanning sounding microscope has platform with objective unit composed of first catcher, object holder conjugate to first heater and cold line, plate with scanner and sonde holder conjugate to platform with the use of drive and suspension system and flange. Drive comes in the form of three four-section piezotubes anchored on platform and interacting with the aid of support with guides mounted on plate and plate clip. Scanner is manufactured in the form of piezotube and has spring multicontact catcher of sonde holder, suspension system is made of extension springs and magnetic quencher produced in the form of set of magnets and copper plates mounted for magnetic interaction with magnets of platform. Object unit includes guides with two mobile plates. One plate carries first catcher of object holder and the other plate has second catcher of object holder conjugate to second heater. EFFECT: expanded functional capabilities, enhanced reliability and resolution of proposed microscope. 12 dwg