COORDINATE TABLE Russian patent published in 2005 - IPC

FIELD: nanotechnology; devices affording part displacement in three coordinates (X, Y, Z) in scanning probe microscopy.

SUBSTANCE: proposed coordinate table designed to ensure precise repeatability of part positioning in the course of its rearrangement, for instance to displace specimens, specimen holders, probes, and other components has platform that mounts first carriage by means of displacement device incorporating first guides; second carriage with base; and specimen holder for displacement in first and second relatively perpendicular coordinates. Newly introduced are second guides secured on first carriage, third guides installed on second carriage, as well as third carriage mounted by means of third guides on second carriage and provided with ferromagnetic insert and specimen holder. Displacement device incorporating first guides is made in the form of three-coordinated piezoengine; second carriage is mounted on second guides; platform also mounts first magnet for displacement and fixation in third coordinate perpendicular to plane of first and second coordinates. Second carriage mounts second magnet for interacting with first magnet and with ferromagnetic insert of third carriage. Second guides can be made in the form of three first spherical supports. Third carriage may have three second spherical supports. Third guides are made in the form of posts each provided on its first end with smooth surface and on second end, with two V-like disposed smooth surfaces. Posts are installed for displacement and fixation in third coordinate on second carriage and are disposed for engaging through first ends three first spherical supports and through second ends, second spherical supports. Three posts may be installed on second carriage so that intersection lines of their V-like disposed smooth surfaces are set at certain angle or in parallel. Second magnet is mounted for displacement and fixation in third coordinate.

EFFECT: enlarged displacement range in all three coordinates for fast replacement of specimens and probes and retention of their original position.

6 cl, 3 dwg