ELECTRO-DRIVEN DIFFRACTION DEVICE Russian patent published in 2009 - IPC H01L41/08 G02F1/29 

FIELD: physics; acoustics.

SUBSTANCE: invention relates to optoelectronics, particularly to acoustooptical and acoustoelectronic devices, including micromechanical and microoptical devices. Periodic texture in the device is created by an elastic flexural wave in a strip with a mirror surface fixed by the ends over a substrate. The end of the strip is connected to the substrate through a piezoelectric transducer. On the substrate there is an array of identical parallel strips which form a one-dimensional matrix. Surfaces of substrates lie in a single plane. The piezoelectric element of the transducer is polarised perpendicular to surfaces of the electrodes, and its thickness is not greater than a quarter wavelength of the elastic wave in the piezoelectric element. Piezoelectric transducers at opposite ends of the strips are connected to two different alternating voltage sources, where the sources can tune output voltage phase. The piezoelectric element can consist of two parts lying at different sides of the longitudinal plane of symmetry of the strips. Said parts have opposite polarisation directions.

EFFECT: efficient excitation of elastic waves in an acoustic thin-film micromechanical waveguide, possibility of exciting different oscillation modes, possibility of electrical variation of the grating constant.

6 cl, 3 dwg