FIELD: physics.
SUBSTANCE: accelerometre has an x-shaped suspension whose central part is attached relative an anchor region, and a support frame joined to the x-shaped suspension and attached relative an inertial mass. Auxiliary movable electrodes are mounted at the corners of the support frame. The substrate and the inertial mass are made from dielectric material. Movable and fixed electrodes and auxiliary fixed electrodes are made from metal. The anchor region of the x-shaped suspension, support frame and auxiliary movable electrodes are made from semiconductor material into a single element.
EFFECT: wider range of accelerations measured, increased accuracy of measuring acceleration and improved operational characteristics of the design.
4 dwg
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