INTEGRATION MICRO-MECHANICAL ACCELEROMETER BASED ON TUNNELING EFFECT Russian patent published in 2006 - IPC G01P15/135 

FIELD: engineering of measuring and micro-system equipment, in particular, of integration elements for measuring values of acceleration.

SUBSTANCE: integration micro-mechanical accelerometer based on tunneling effect contains substrate, immoveable electrode, inertial mass positioned with space relatively to immoveable electrode, moveable element positioned on inertial mass forming a tunneling contact with immoveable electrode and used as movements transformer, resilient beam which by one end is rigidly connected to inertial mass and by another end is rigidly held relatively to substrate. In accordance to invention, introduced to aforementioned device are: first area of isolating dielectric positioned below moveable electrode and separating it from the substrate, second area of isolating dielectric, positioned below immoveable electrode, metallic heating element, positioned above third area of isolating dielectric.

EFFECT: increased sensitivity and manufacturability.

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