INTEGRATED MICRO-MECHANICAL TUNNEL ACCELEROMETER Russian patent published in 2018 - IPC G01P15/08 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring and microsystem technology, namely to integral measuring elements of acceleration values. Accelerometer contains semi-insulating substrate, fixed electrode base, electrostatic actuator base, anchor region of movable electrode, technological layer in the area of fixed electrode, technological layer in the area of electrostatic actuator, elastic suspension, contact area of stationary electrode, contact area of electrostatic actuator, contact area of movable electrode, inertial mass, stationary electrode, static electrode of electrostatic actuator, contact to movable electrode, movable electrode of electrostatic actuator, movable electrode. Displacement transducer is tunnel contact formed by fixed electrode and movable electrode. Elastic suspension has J-shaped shape consisting of segment of cylindrical shell adjacent at one end to anchor region of movable electrode and rigidly fixed relative to semi-insulating substrate, and second end adjoining inertial mass.

EFFECT: increase in measurement sensitivity of acceleration component directed along axis perpendicular to plane of semi-insulating substrate.

1 cl, 2 dwg