MULTI-AXIAL INTEGRAL MICROMECHANICAL TUNNEL-TYPE ACCELEROMETRE Russian patent published in 2011 - IPC G01P15/18 B81B7/00 

Abstract RU 2415443 C1

FIELD: physics.

SUBSTANCE: proposed accelerometre 1 comprises substrate 1, displacement converter 2, inertial weight 3, active suspension zones 4 and 9, passive suspension zone 5, stationary electrode 6, moving electrode 7, as well as two additional suspensions with active zones 15, 16 and 23, 24, respectively, and with passive zones 17 and 25, respectively, two additional inertial weights 13 and 21, two additional stationary electrodes 11 and 19, two additional moving electrodes 12 and 20 and two additional tunnel-type converters 34 and 35 of displacement converters. Displacement converter 2 represents a tunnel contact formed by stationary electrode 6 made up of cylindrical shell rigidly secured relative to substrate 1.

EFFECT: possibility to measure simultaneously three mutually perpendicular components of acceleration.

3 dwg

Similar patents RU2415443C1

Title Year Author Number
INTEGRATED MICRO-MECHANICAL TUNNEL ACCELEROMETER 2017
  • Denisenko Mark Anatolevich
  • Ryndin Evgenij Adalbertovich
  • Isaeva Alina Sergeevna
RU2660412C1
INTEGRAL NANOEMECHANICAL TUNNEL SWITCH 2022
  • Denisenko Mark Anatolevich
  • Isaeva Alina Sergeevna
  • Lysenko Igor Evgenevich
RU2794468C1
INTEGRAL MICROMECHANICAL AUTOEMISSION ACCELEROMETER 2006
  • Ryndin Evgenij Adal'Bertovich
  • Pristupchik Nikita Konstantinovich
RU2298191C1
INTEGRATED MICROMECHANICAL FIELD EMISSION ACCELERATOR 2009
  • Marinushkin Pavel Sergeevich
  • Levitskij Aleksej Aleksandrovich
RU2390031C1
INTEGRATION MICRO-MECHANICAL ACCELEROMETER BASED ON TUNNELING EFFECT 2005
  • Ryndin Evgenij Adal'Bertovich
  • Pristupchik Nikita Konstantinovich
RU2289822C1
METHOD OF DEVICES WITH FLOPPY MICROBRIDGES MANUFACTURE 2016
  • Tarasov Mikhail Aleksandrovich
  • Chekushkin Artem Mikhajlovich
  • Yusupov Renat Albertovich
RU2632630C1
METHOD OF MAKING MULTILAYER OHMIC CONTACT FOR PHOTOELECTRIC CONVERTER (VERSIONS) 2009
  • Andreev Vjacheslav Mikhajlovich
  • Soldatenkov Fedor Jur'Evich
  • Il'Inskaja Natal'Ja Dmitrievna
  • Usikova Anna Aleksandrovna
RU2391741C1
MICROSTRIP STABILISED RESONANT-TUNNELING GENERATOR OF ELECTROMAGNET WAVES FOR MILLIMETER AND SUBMILLIMETER RANGE OF WAVELENGTHS 2004
  • Kazakov Igor' Petrovich
  • Karuzskij Aleksandr L'Vovich
  • Mitjagin Jurij Alekseevich
  • Murzin Vladimir Nikolaevich
  • Tskhovrebov Andrej Mikhajlovich
RU2337467C2
ELECTROSTATIC TRANSDUCER 2021
  • Sokolov Aleksej Aleksandrovich
  • Konyashkin Valerian Vasilevich
RU2797442C2
METAL-DIELECTRIC-SEMICONDUCTOR STRUCTURE BASED ON AB COMPOUNDS AND ITS FORMATION METHOD 2010
  • Kesler Valerij Gennad'Evich
  • Kovchavtsev Anatolij Petrovich
  • Guzev Aleksandr Aleksandrovich
  • Panova Zoja Vasil'Evna
RU2420828C1

RU 2 415 443 C1

Authors

Konoplev Boris Georgievich

Pristupchik Nikita Konstantinovich

Ryndin Evgenij Adal'Bertovich

Dates

2011-03-27Published

2009-12-04Filed