FIELD: measuring technique; micro-system engineering.
SUBSTANCE: accelerometer has substrate, four motionless electrode, inertial mass, four movable electrodes, four elastic beams and four anchor areas of suspense, and twelve areas of insulating dielectric. Three mutually perpendicular components of acceleration can be measured simultaneously due to usage of effect of tunneling of charge carriers among four pairs of movable and motionless electrodes.
EFFECT: improved sensitivity; improved precision of measurement.
2 dwg
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