METHOD OF OBTAINING FILM COATINGS OF TIN OXIDE ON SUBSTRATES Russian patent published in 2010 - IPC H01L21/20 B82B3/00 

FIELD: chemistry.

SUBSTANCE: method of obtaining film coatings of tin oxide on substrates involves conversion of tin oxide precursors to gas phase by heating 65-150°C. The gaseous precursors are then transferred by a carrier gas such as air, oxygen or mixture thereof with aron or nitrogen, which is supplied at a rate of 20-250 ml/min, to a decomposition zone heated to 250-550 °C, where the substrate is placed so as to deposit a tin oxide film. The tin oxide precursors used are selected from crown-containing β-diketones or tin carboxylates. The crown-containing β-diketones or tin carboxylates are preferably selected from: [Sn(18-crown-6)(C₅H₇O₂)₂], [Sn(18-crown-6)(C₅H₄O₂F₃)₂], [Sn(18-crown-6)(C₅HO₂F₆)₂], [Sn(18-crown-6)(CH₃COO)₂], [Sn(18-crown-6)(CF₃COO)₂].

EFFECT: obtaining film coatings of tin oxide using non-toxic tin oxide precursors which are not subject to hydrolysis during storage and which do not release toxic by-products during thermolysis, the method does not require an additional oxidant gas in the zone for decomposing the precursor and depositing the film coatings.

2 cl, 1 tbl, 4 dwg, 8 ex