FORMATION METHOD OF MULTI-LAYER NANOCRYSTALLINE FILMS WITH HETEROGENEOUS BOUNDARY LINE AND FORMATION DEVICE OF MULTI-LAYER NANOCRYSTALLINE FILMS WITH HETEROGENEOUS BOUNDARY LINE Russian patent published in 2011 - IPC C30B25/22 B82B3/00 

FIELD: electricity.

SUBSTANCE: method consists in preparation of solution of mixture of metal salts, aerosol application of the above solution to the substrate surface in gas carrier flow, removal of solvent from the solution of mixture of metal salts and formation on surface of substrate of multi-layer nanocrystalline films of metals as a result of thermal decomposition of metal salts; at that, surface of substrate is pre-heated; aerosol fog is formed from solution of mixture of metal salts, which is transferred and deposited on the substrate surface of oxygen-containing carrier gas; carrier gas pressure is maintained higher than atmospheric pressure; heterogeneous boundary line is formed by applying to the formed nanocrystalline layer of nanocrystalline layer of the other chemical composition differing from the previous one. Actually, there proposed is new manufacturing technology of metal semiconductor and dielectric materials and instruments by using nanocrystalline films with high adhesion and various phase composition.

EFFECT: obtaining multi-layer alternating nanocrystalline films of various phase composition with possibility of performing the monitoring of thickness of films and dispersability of grains; increasing the capacity of obtaining such multi-layer alternating nanocrystalline films; reducing the time of their obtaining; reducing the labour intensity of the process, and simplifying the device implementing the proposed method.

8 cl, 7 dwg, 19 ex, 2 tbl