FIELD: process engineering.
SUBSTANCE: invention relates to high-pressure reactor with fluidised layer designed to produce granulated polycrystalline silicon. Said rector comprises tube, shell embracing said tube, tune inner zone and outer zone formed between reactor shell and tube. Note that fluidised layer of silicon particles is formed in aforesaid inner zone and silicon is settled, while no such layer is formed in outer zone neither silicon is settled therein. Besides high-pressure reactor incorporates pressure difference control element to maintain difference between pressures in aforesaid inner and outer zones equal to 0-1 bar.
EFFECT: possibility to maintain physical stability of reactor tube and produce granulated polycrystalline silicon at comparatively high reaction pressure.
26 cl, 10 ex, 2 dwg
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Authors
Dates
2010-08-27—Published
2007-02-07—Filed