FIELD: machine building.
SUBSTANCE: procedure consists in placement of items in vacuum chamber on device, in applying potential of electric bias to device and items, in item surface ion cleaning and in application coating on them by means of electric arc evaporator equipped with at least one cathode of electric arc evaporator made as cylinder shell with arrester of cathode spot travelling in axial direction. The cylinder shell consists of a set of contacting rings-shells interconnected by welding utilising dissimilar evaporating materials, while rings-shells are made out of materials chosen from elements of IVb, Vb, VIb groups of periodic table of the elements, Al and their alloys. Coating is applied simultaneously with travel of the cathode spot arrester. The cathode rotates around its axis and reciprocates in axial direction.
EFFECT: good cooling of cathode and high degree of stability of control over position of cathode spot on surface of its evaporation, also facilitation of alternate evaporation of various metals from one cathode.
27 cl, 3 dwg, 1 ex
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Authors
Dates
2010-09-20—Published
2008-04-08—Filed