FIELD: electricity.
SUBSTANCE: invention is related to procedure of vacuum application of wear-, corrosion- and erosion-resistant ion-plasma coatings and may be applied in machine building, mostly for critical parts, for instance rotor and guide vanes of turbomachines. Vanes are installed in vacuum chamber of installation, electric displacement is applied to vanes, ion cleaning of surface is carried out, and coating is applied on them by electroarc evaporation of materials with simultaneous rotation and reciprocal motion of cylindrical water-cooled cathodes. Inside each cathode there is moving magnetic fixator arranged to fix position of cathode spot. Value of cathode reciprocal motion amplitude in axial direction (Hc.reciprocal) makes as follows: Hc.reciprocal=(0.2…3) Hv.l., where Hv.l. - limit height of vacuum chamber working zone with ratio of cathode height (Hc) to limit height of vacuum chamber working zone (Hv.l.) that equals (0.2…4). Invention uses cathodes from the following metals and their alloys: Ti, Zr, Hf, Cr, V, Nb, Ta, Mo, W, Al, La, Eu, Ni, Co, Y.
EFFECT: improved quality of coatings due to reduction of drop phase and improved cooling of cathode surface without increase of installation vacuum chamber dimensions.
27 cl, 1 dwg, 1 ex
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Authors
Dates
2010-01-27—Published
2008-05-04—Filed