CATHODE UNIT OF ELECTRIC ARC EVAPORATOR Russian patent published in 2010 - IPC C23C14/34 C23C14/56 

FIELD: electricity.

SUBSTANCE: invention is related to procedure of vacuum application of wear-, corrosion- and erosion-resistant ion-plasma coatings, in particular to cathode unit of electric arc evaporator and may be used in machine building, mostly for application of coatings onto lengthy products, for instance blades of steam turbines. Cathode unit comprises cylindrical cooled cathode arranged from evaporated material in the form of cylindrical shell with the possibility of rotation around its own axis, facilities for supply and drain of cooling medium, facilities for electric connection of cathode with source of discharge power supply, facilities for fixation of cathode spot position on surface of cathode evaporation. Cathode is arranged as composite of at least two shell segments, which produce solid shell when matched. In process of material application cathode rotates around its own axis. Moreover, cathode spot moves along helical line, besides position of spot is defined by speed of cathode rotation and speed of cathode spot position fixator motion. Fixator is arranged with the possibility of reciprocal displacement inside cooled cathode.

EFFECT: invention makes it possible to provide high stability of cathode spot position control and to produce various materials from one cathode.

6 cl, 2 dwg, 1 ex