METHOD OF MONOSILANE PRODUCTION Russian patent published in 2010 - IPC B01J8/02 

FIELD: process engineering.

SUBSTANCE: invention relates to the plant and method intended for continuous production of monosilane and tetrachlorosilane by catalytic trichlorosilane dismutation at operating temperature and 1 to 50 bar. Trichlorosilane is preheated in heat exchanger and fed into counter-flow catalytic reactor. Mix of products formed in counter-flow reactor is condensed, at least partially, in condenser at -25 to 50°C, and condensate is directed back into said reactor. Product phase not condensed in reactor, is fed into condensation unit operated at -40 to -110°C. Volatile product phase is fed from condensation unit into rectification column operated at -60 to -170°C. Monosilane is released at rectification column top. Tetrachlorosilane-containing residual product from counter-flow reactor is reduced to operating temperature of 60 to 110°C in evaporator. Said residual product is fed via heat exchanger inside double wall of counter-flow reactor. Tetrachlorosilane-containing residual product flow is released at the reactor top zone level.

EFFECT: high-purity product, possibility to use residual product power.

17 cl, 2 dwg, 1 tbl, 1 ex