FIELD: physics.
SUBSTANCE: invention relates to plasma engineering, particularly to working medium supply systems and can be used in pneumatic channels for delivering working medium to plasma accelerators, as well as in plasma sources used in ion-plasma treatment of surfaces of various materials in a vacuum. According to the invention, in a gas-electric decoupler of the channel for feeding working medium of a plasma accelerator, having an isolator with a spiral channel for passage of working medium which is hermetically fitted in the abruption of the channel for feeding working medium, the inlet and outlet of the spiral channel at the end walls of the isolator are on the edge of the spiral channel.
EFFECT: high reliability of the gas-electric decoupler working at high potential difference and in a wide range of flow rate of gaseous working medium at high thermal effects, and reduced hydraulic loss of flow of the working medium and easier manufacturing of isolators.
6 cl, 1 dwg
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Authors
Dates
2011-01-27—Published
2009-12-29—Filed