DIELECTRIC SEPARATOR OF SUPPLY CHANNEL OF WORKING MEDIUM OF ION AND ELECTRON SOURCES Russian patent published in 2019 - IPC H05H1/54 

Abstract RU 2684166 C1

FIELD: physics.

SUBSTANCE: invention relates to devices for supply of working medium (WM) of ion and electron sources and can be used in pneumatic tracts of WM supply to plasma accelerators and systems of plasma sputtering, and also to be used in mass-spectrometers and ion microscopes. Dielectric separator comprises an elongated housing made of an electrically insulating material with connecting elements at the ends and a longitudinal channel filled with a dielectric inorganic material with open porosity, wherein transverse grids are arranged along channel length to prevent material displacement.

EFFECT: technical result is increased electric strength, as well as possibility of setting the required number of sections formed by grids, selection of length of dielectric housing of dielectric separator of supply channel of working medium of ion and electron sources between connecting elements under voltage.

1 cl, 1 dwg

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RU 2 684 166 C1

Authors

Khabibullin Eldar Rinatovich

Egorov Egor Sergeevich

Dates

2019-04-04Published

2018-06-09Filed