METHOD OF MANUFACTURING MINIATURE PERIODIC SYSTEMS OF ELECTROVACUUM MICROWAVE DEVICES FROM COPPER WITH NANO- AND MICRO-CRYSTALLINE STRUCTURE Russian patent published in 2011 - IPC H01J23/24 H01J25/34 

FIELD: physics.

SUBSTANCE: in the disclosed method, lamellae are made from monolithic copper material, where said lamellae have width and working gaps in between of up to 50 mcm, for which a fine-grained structure is formed from copper through equal channel angular pressing at a deformation rate of 0.4 mm/s at room temperature and with total number of pressing cycles equal to 8, with subsequent annealing at temperature of up to 150°C and holding for up to 1 hour to remove stress. Miniature high-precision periodic systems, having lamella thickness and working gaps in between of up to 50 mcm are made from spent copper through a combination of lathe machining and spark cutting.

EFFECT: high manufacturability of periodic systems of travelling-wave and backward-wave tubes, magnetrons and similar electrovacuum microwave devices in the millimetre and submillimetre wavelength range, while ensuring good output and operational parametres of the devices owing to reduction of wave loss increase in stability of their functioning.

2 cl, 3 dwg