METHOD FOR MANUFACTURING MINIATURE COPPER PARTS FOR ELECTRONIC MICROWAVE DEVICES Russian patent published in 2023 - IPC B23H7/02 C23F1/18 C23G1/00 C23G1/10 H01J23/24 H01J25/00 

FIELD: electronic engineering.

SUBSTANCE: invention can be used in manufacturing of miniature parts made of copper, such as miniature retarding systems, vacuum microwave devices. The method includes cutting with an electroerosive wire-cutting machine with a CNC system, chemical cleaning, washing and polishing. Cleaning and polishing of parts is carried out in the following sequence: they are treated in a container with a magnetic stirrer with an etching solution to remove the defective layer of the following composition: NaOH 4-8%, H₂O₂ 8-15%, C₁₀H₁₄N₂Na₂O₈ 4-12%, tartaric acid 6-12%, water - the rest, at a temperature of 45-75°C in 1-3 minute cycles with washing in 20% hydrochloric acid and water after each cycle until visible traces of electroerosion disappear, they are treated in a container with a magnetic stirrer with a suspension solution for mechanical polishing containing 2-10% of SiC abrasive powder with a particle size distribution of less than 2 mcm for 2-6 min, then etching is carried out in cycles of 0.5-1 min in a solution for chemical polishing of the following composition: H₃PO₄ 50-70%, HNO₃ 8-12%, HCl 0.4-1%, CH₄N₂S 0.07-0.7%, water - the rest, at room temperature until a shine appears on the details, washed with water after each cycle, then the parts are washed in acetone, blown first with dry nitrogen, then with carbon monoxide.

EFFECT: manufacturing high-precision systems of very small sizes for electronic microwave devices with a high class of surface quality by the electrospark method.

1 cl, 4 dwg, 1 tbl, 1 ex