FIELD: physics.
SUBSTANCE: method involves scanning a control object with a beam of electromagnetic radiation while discretely changing the angular position of the control object relative the beam of electromagnetic radiation, recording intensity of radiation after passing through the control object during scanning, and processing the obtained information with subsequent reconstruction of the structure of the object based on the processed information. During scanning, a beam of electromagnetic radiation with discretely varying dimensions of the cross section is formed. One of the cross dimensions of the cross section of the beam is changed by a value which corresponds to the required resolution. Intensity of the radiation is recorded after each change in the cross dimension of the cross section of the beam. During processing, the difference between values of two successive recordings of the intensity is calculated to obtain a set of values which are used to reconstruct the structure of the object.
EFFECT: high resolution of the scanning microscope.
7 cl, 2 dwg
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