SAPPHIRE SUBSTRATE (VERSIONS) Russian patent published in 2011 - IPC C30B29/20 H01L31/36 

Abstract RU 2414550 C1

FIELD: machine building.

SUBSTANCE: here is disclosed sapphire substrate with flat surface and crystallographic orientation chosen from group including orientation in a-plane, r-plane, m-plane and c-plane. Also, this substrate has nTTV approximately not over 0.037 mcm/cm2, nTTV corresponds to change of total thickness normalised relative to area of flat surface. The substrate has approximate diametre not less, than 9.0 cm.

EFFECT: production of substrates of high quality with large surface areas.

15 cl, 6 tbl, 5 dwg

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RU 2 414 550 C1

Authors

Tanikella Brakhmanandam V.

Simpson Meht'Ju A.

Chinnakaruppan Palaniappan

Rizzuto Robert A.

Cherian Isaak K.

Vedantam Ramanudzham

Dates

2011-03-20Published

2007-12-21Filed