FIELD: machine building.
SUBSTANCE: here is disclosed sapphire substrate with flat surface and crystallographic orientation chosen from group including orientation in a-plane, r-plane, m-plane and c-plane. Also, this substrate has nTTV approximately not over 0.037 mcm/cm2, nTTV corresponds to change of total thickness normalised relative to area of flat surface. The substrate has approximate diametre not less, than 9.0 cm.
EFFECT: production of substrates of high quality with large surface areas.
15 cl, 6 tbl, 5 dwg
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Authors
Dates
2011-03-20—Published
2007-12-21—Filed