FIELD: process engineering.
SUBSTANCE: invention relates to crystallographic substrates and method of their finishing. Proposed method comprises defining parameters of monocrystalline body crystallographic orientation and calculating the angle of grain-boundary between selected monocrystalline body crystallographic direction and projection of crystallographic direction along the plane of monocrystalline body first outer main surface. Then, material is removed from at least a part of said first outer main surface to vary aforesaid angle.
EFFECT: production of high-quality large-size substrates.
15 cl, 9 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR REFINEMENT OF SUBSTRATE ORIENTATION FOR DIAMOND EPITAXY | 2012 |
|
RU2539903C2 |
| METHOD OF MACHINING SAPPHIRE SUBSTRATE | 2007 |
|
RU2422259C2 |
| LOT OF SAPPHIRE SUBSTRATES AND METHOD OF ITS PRODUCTION | 2007 |
|
RU2412037C1 |
| SAPPHIRE SUBSTRATE (VERSIONS) | 2007 |
|
RU2414550C1 |
| SINGLE-CRYSTAL SPINEL PLATE | 2004 |
|
RU2335582C2 |
| METHOD FOR MANUFACTURING SINGLE-CRYSTAL SAPPHIRE SEED AND ALSO SINGLE-CRYSTAL SAPPHIRE WITH PREFERRED CRYSTALLOGRAPHIC ORIENTATION AND EXTERNAL DETAILS AND FUNCTIONAL COMPONENTS FOR WATCH AND JEWELERY | 2022 |
|
RU2802604C1 |
| METHOD OF REFINING ORIENTATION OF WAFERS OF SEMICONDUCTOR AND OPTICAL MATERIALS | 2009 |
|
RU2411606C1 |
| STRUCTURAL MATERIAL BASED ON MOLYBDENUM AND/OR TUNGSTEN OR THEIR ALLOYS WITH A PROTECTIVE HEAT-RESISTANT COATING AND AN ARTICLE MADE FROM IT | 2018 |
|
RU2702254C1 |
| METHOD OF MANUFACTURING ALKALINE-HALOID SCINTILLATORS | 1991 |
|
RU2017170C1 |
| METHOD FOR MANUFACTURING OF HIGH-TEMPERATURE SUPERCONDUCTING JOSEPHSON JUNCTION | 1996 |
|
RU2105390C1 |
