FIELD: physics.
SUBSTANCE: detecting elements of a pressure fluctuation sensor made from a dielectric film are used in a gas medium, thus sensitivity to pressure fluctuation is supplemented with sensitivity to humidity and temperature fluctuations caused by pressure fluctuation. The need arises for separating the useful signal of pressure fluctuation from interference and noise from temperature and humidity fluctuation. The useful signal is picked up by carrying out several experiments. The experiments are separately carried out at different humidity and temperature fluctuation values and then during simultaneous humidity and temperature fluctuation, and in the last experiments, pressure fluctuation is set.
EFFECT: higher measurement accuracy.
1 dwg
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