CAPACITIVE INERTIAL PRESSURE SENSOR, METHOD OF ITS ASSEMBLY AND METHOD OF PRESSURE MEASURING Russian patent published in 2016 - IPC G01L9/12 

FIELD: measuring equipment.

SUBSTANCE: invention can be used for investigation of transient processes in aviation and space equipment and in different industries. Disclosed are design and assembly method of inertial capacitance sensor, as well as method of measuring pressure in measuring equipment. Capacitive inertial pressure sensor consists of three dielectric films. First dielectric film comprises main screen, second dielectric film contains bottom plates with outputs and screen. Both films are made from solid polyimide, on upper surface of third dielectric film mating plate is formed with output and screen. Package is assembled from layers of three dielectric films, films are interconnected between each other and analysed object with help of glue. In capacitive inertial pressure sensor third dielectric film is made from soft dielectric, on its surface combined mating plate is formed, all plates with outputs and screens are made from copper or nickel foil, wherein plates with outputs and screens on surfaces of second and third dielectric films are formed by photolithography, with thickness of foil from copper or nickel is from 5 to 20 mcm.

EFFECT: reduced time and energy resources consumption of actuator during switching from one steady-state to another established mode, due to fact that in order to increase time of observation of transient process in gas medium is represented by inertial capacitance sensor, detecting element of sensor is made from dielectric material with minimum speed of sound wave propagation inside it.

3 cl, 3 dwg, 1 tbl