METHOD FOR DETERMINING THICKNESS OF ALUMINIUM OXIDE FILM DURING ANODIC OXIDATION OF COLD CATHODE IN GLOW OXYGEN DISCHARGE Russian patent published in 2017 - IPC G01B11/06 

FIELD: chemistry.

SUBSTANCE: method for determining the average thickness of the oxide film during the anodic oxidation of a cold cathode in a glow oxygen discharge, including the creation of a high vacuum in the control region, is characterized in that the area of the working surface of a certain cold cathode configuration is determined, the internal volume of the vacuum region occupied by a vacuum sensor located outside the region of the cold cathode and a connected vacuum channel with a vacuum region containing a cold cathode process device, an internal volume of the vacuum region occupied by the cold cathode process device, the vacuum system and the vacuum region are filled with oxygen to a constant pressure, the vacuum region is disconnected from the vacuum system, the magnitude of the steady-state pressure is recorded in the vacuum regions containing the vacuum sensor and the cold cathode process device before the ignition of the glow discharge in the cold cathode process device, the glow discharge is lit in the internal volume of the vacuum region occupied by the cold cathode process device, the oxygen pressure is fixed by the vacuum sensor in the selected time during the anodic oxidation of a cold cathode in a glow discharge, the average thickness of the oxide film of aluminium is calculated on the working surface of the particular cold cathode configuration in the selected time during the anodic oxidation in a glow oxygen discharge according to the formula.

EFFECT: providing the possibility of determining the average thickness of the aluminium oxide film without disturbing the cathode structure.

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