METHOD TO FORM ORDERED NANOSTRUCTURES ON SUBSTRATE Russian patent published in 2011 - IPC B82B3/00 H01L21/203 

FIELD: nanotechnologies.

SUBSTANCE: invention relates to the field of nanotechnologies and may be used to make ordered nanostructures, used in micro- and nanoelectronics, optics, nanophotonics, biology and medicine. The proposed method may be used to manufacture single-layer and multilayer nanostructures, also the ones containing layers of different composition, and also two-dimensional, three-dimensional ordered structures of various materials. According to the method, the substrate and the initial substrate, containing nanoparticles, are arranged to form a space between them. The substrate is sprayed in the specified space in the form of a cloud of drops, every of which contains at least one nanoparticles. Creation of a substrate in the form of a sprayed cloud of drops is done by means of ultrasound exposure, when the source of ultrasound effect is located relative to the substrate with the possibility to arrange a sprayed cloud of drops in the specified space. Control of motion in the specified space and drops deposition onto the substrate is carried out through their exposure to external electric and/or magnetic fields.

EFFECT: wider class of materials, which could be used to form ordered nanostructures, higher accuracy of nanoobjects reproduction, stability of nanostructures formation process in one technological space.

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