FIELD: process engineering.
SUBSTANCE: invention relates to wet chemical modification of substrate outer surfaces. Coat is applied on flat substrate 2 using fluid F contained in container 3. Chemical components are deposited on substrate surface to form resistant layer by appropriate temperature control. Heating required for applying coat on substrate bottom surface and producing necessary layer is performed with the help of, at least, one heater 11. Said heater heats substrate top surface to required temperature. Top surface is not intended for coat application. In processing, substrate top surface is not wetted by heating fluid, nor substrate 2 is clamped from above or protected.
EFFECT: uniform and continuous application of coat.
12 cl, 1 dwg
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