FIELD: metallurgy.
SUBSTANCE: methane is thermally decomposed on polished plate of silicon at pressure 10-30 torr and temperature 1200-1350°C. Heating is performed by transmitting electric current through two parallel tapes of carbon foil. The silicon plate is positioned in a gap between these tapes.
EFFECT: production of nano crystal layers of graphite of high quality.
1 dwg, 7 ex
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