EMISSION METHOD TO MONITOR SPEED OF DEPOSITION AND COMPOSITION OF COATINGS APPLIED IN VACUUM Russian patent published in 2011 - IPC G01J3/00 G01N22/00 

Abstract RU 2431812 C1

FIELD: instrument making.

SUBSTANCE: in the method they register emission spectra of atoms in steam flow passing between the anode and the cathode and crossing flow of low-energy electrons. The electronic beam is placed into the magnetic field, and emission lines are registered by means of a charged coupled device.

EFFECT: increased intensity of steam flow emission lines without increase of cathode filament current, emission current and energy of exciting electrons, as a result level of emission lines intensity to level of noise caused by cathode thread radiation increases.

2 dwg

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RU 2 431 812 C1

Authors

Semenov Ehrnst Ivanovich

Chernikov Vitalij Dmitrievich

Dates

2011-10-20Published

2010-04-08Filed